Sensing with serial or parallel micromechanical resonators

Honglong Chang

Northwestern Polytechnical University, China

This talk will present and summarize the basic theories and applications for serial and parallel connections of micromechanical resonators for high-sensitivity sensing. For the serial connection theory, the mode-localized sensing is especially introduced. Several sensors including accelerometers, electrometers, magnetometers, and ampere meters are presented.

Biography: Honglong Chang received his B.S., M.S., and Ph.D. degrees all in mechanical engineering from Northwestern Polytechnical University (NPU), Xi’an, China in 1999, 2002, and 2005, respectively. He currently serves the Dean of the School of Mechanical Engineering and the director of the MOE Key Laboratory of Micro and Nano Systems for Aerospace, NPU. From Oct. 2011 to Nov. 2012, he was a Visiting Associate (Faculty) with the Micromachining Laboratory, California Institute of Technology, Pasadena, USA. His research interests are MEMS sensors with applications. He has published more than 100 international peer-reviewed journal papers and more than 80 international conference papers in the MEMS field. With his students, he was a recipient of the Best Paper Award in some flagship conferences including Transducers, IEEE MEMS, and IEEE Sensors. He also currently serves as the associate editor of some flagship journals such as IEEE J-MEMS, NPG Microsystems & Nanoengineering.

Abstract: In the computer industry, the multi-core CPU were successfully used to break the bottlenecks of the computation limits. For the circuit design, the electric components including resistors, capacitors, and inductors are connected in various forms for pursuing better circuit performance. So, can the micromechanical resonators be serial or parallel connected to form a network of the multi-DoF resonator system for improving the performance of the MEMS sensors?