Biography: Prof. Xinxin Li received B.S. degree from Tsinghua University and Ph.D. degree from Fudan University. He was engaged as Research Associate in Hong Kong University of Science and Technology, Research Fellow in Nanyang Technological University, Singapore, and Lecturer (COE Fellowship) in Tohoku University, Japan. Since 2001, he has been a Professor of Shanghai Institute of Microsystem and Information Technology, Chinses Academy of Sciences, where he had served as the director of State Key Lab of Transducer Technology of China. He is also an Adjunct Professor for Fudan University and ShanghaiTech University. His research interest includes micro/nano sensors and MEMS/NEMS technology. He was granted the National Science Fund of China for Distinguished Young Scholar in 2007. His Ph.D. student was awarded National Excellent 100 Ph.D. Dissertation in 2009. He has invented about 200 patents and published more than 600 articles in refereed journals and conferences (including about 300 SCI journal articles) with total citation of more than 10 thousands. He served as TPC member for IEEE MEMS and IEEE Sensors. Now he serves the conference of Transducers as Asia/Oceania regional TPC Chair. He is the Editorial Members for J Micromech. Microeng., Microsystema and Nanoengineering, Scientific Reports, and Micromachines.

Single-wafer single-side SON fabrication techniques for new generation MEMS sensors

Xinxin Li

Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China

Single-side processed MEMS fabrication techniques in single-wafer is compatible with standard IC foundry manufacturing mode and, thereby called the 3th generation silicon MEMS technology for low-cost volume micro-sensor production. Silicon-on-nothing (SON) processes are just such kind of MEMS tool for fabrication of new generation micro sensors and actuators. The talk will address typical SON techniques recently developed by Robert-Bosch (APSM process), STMicroelectronics (VENSENS process), Toshiba (migration silicon process) and Xinxin Li group of SIMIT-CAS cooperated with Shanghai MISTech Co. Ltd (MIS process). The speaker will discuss and compare the principles and performance of the emerging SON techniques by introducing their successful applications in MEMS transducers. A detailed introduction to MIS process together with its updated versions of TUB and BUT is finally given to demonstrate the broad applications of the process in various advanced micro-sensors.