Wireless and Passive Sensor for Extreme High Temperature Sensing based on Surface Acoustic Wave Devices

Weipeng Xuan

Hangzhou Dianzi University, China

Surface acoustic wave (SAW) sensors have been widely used in the sensing of physical parameters such as temperature, pressure, strain. SAW sensors have their unique advantages of being easy to wireless and passive interrogated, which showed promising applications in ultrahigh temperature environment. The main challenge to maintain high-temperature performance of surface acoustic wave (SAW) devices is to improve the high-temperature resistance of the interdigital transducers (IDT).  In this report, we will discuss the development of the Pt-Rh alloy-based multilayered composite IDTs for high-temperature applications. Composite electrode-based wire-type resistors with different structures were prepared by magnetron sputtering, and their resistances and surface morphologies at temperatures up to 1600 °C were investigated.

Biography: Prof. Weipeng Xuan is currently a professor in Hangzhou Dianzi University, College of Electronics and Information, Hangzhou, China. He received his PhD from Zhejiang University, 2017. Until now, he has published over 80 SCI/EI papers, and more than 20 patents. His research interest focuses on Piezo-MEMS devices, RF-MEMS devices, include surface and bulk acoustic wave devices, and piezo-pump device.